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This introductory book assumes minimal knowledge of the existence of integrated circuits and of the terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors. It presents to readers the basic information necessary for more advanced processing and design books. Focuses mainly on the basic processes used in fabrication, including lithography, oxidation, diffusion, ion implementation, and thin film deposition. Covers interconnection technology, packaging, and yield. Appropriate for readers interested in the area of fabrication of solid state devices and integrated circuits.
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Product details
Paperback: 336 pages
Publisher: Pearson; 2 edition (October 27, 2001)
Language: English
ISBN-10: 0201444941
ISBN-13: 978-0201444940
Product Dimensions:
7 x 1.2 x 9.2 inches
Shipping Weight: 10.4 ounces (View shipping rates and policies)
Average Customer Review:
4.0 out of 5 stars
20 customer reviews
Amazon Best Sellers Rank:
#353,884 in Books (See Top 100 in Books)
A really helpful text. I cracked open this book not knowing a thing about MEMS and was able to follow the majority of the discussions. There are couple of practice problems in the text, but probably not enough to use it as sole preparation for an exam. This was mainly used as a reference text for my Introduction to MEMS course, but it could give quite a lot of insight on its own. Some of the methods are a little older, but many of them are still in practice.
Its okay. Kinda glosses over the important details but supplemented with good motes it makes for an easy read. Much shorter than Campbell.
I bought this textbook for a graduate level mechanical engineering course. The material in there is solid. The explanations are not always self-evident (i.e. I cannot understand all of the material without lecture to clarify the material), but all of the information is there.
Great Book!
For a beginner in my Nano and Micro engineering classes this book is simple enough to read that I dont feel like i am completely lost in it. I suggest this if you are looking for a semiconductor/mosfet book that is less expensive yet thorough.
This book is for my current Chemical Engineering Semiconductor lab. It is very clear and concise which is nice. I rather have a thin, well written book, than a dense and over-informative text. I would highly recommend it for after semiconductor fabrication coursework.
This book offers a concise and pheripheral approach to introductory microelectric fabrication. It covers the essentials that are needed to delve into more intricate and complex fab issues. It is a good starting material for me, even though I might sometime get lost reading concepts from it only. It is great resource when you have it in company of another fab book. hence complememting each other. Have fun digging this!!!!!!!!
good
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